A mathematical model for heat transfer process in HPH furnace was established and verified, then applied to analysis of the relationship between gas flow rate and annealing time.

通过建立全氢罩式退火炉炉内传热过程的数学模型，并经过实测验证后，分析了循环风量与退火时间的关系。

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The process of annealing is studied according to the need of exceed high pressure gas discharge lamp.

结合超高压气体放电光源的要求，对玻壳精密退火工艺进行研究。

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In addition, the annealing process of SiC films is mostly carried out in vacuum, argon gas or nitrogen gas ambience.

另外，对碳化硅薄膜的退火处理大多是在真空、空气、氩气或氮气气氛下进行。

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